JPH0263532U - - Google Patents
Info
- Publication number
- JPH0263532U JPH0263532U JP14365288U JP14365288U JPH0263532U JP H0263532 U JPH0263532 U JP H0263532U JP 14365288 U JP14365288 U JP 14365288U JP 14365288 U JP14365288 U JP 14365288U JP H0263532 U JPH0263532 U JP H0263532U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- holder
- heated
- warping
- substrate holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 21
- 239000000463 material Substances 0.000 claims 1
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14365288U JPH0263532U (en]) | 1988-11-02 | 1988-11-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14365288U JPH0263532U (en]) | 1988-11-02 | 1988-11-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0263532U true JPH0263532U (en]) | 1990-05-11 |
Family
ID=31410663
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14365288U Pending JPH0263532U (en]) | 1988-11-02 | 1988-11-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0263532U (en]) |
-
1988
- 1988-11-02 JP JP14365288U patent/JPH0263532U/ja active Pending
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